12/25/2010	10:51:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/25/2010	10:52:03 AM	Recipe started at 10:51 AM
12/25/2010	10:52:03 AM	Helium valve closed
12/25/2010	10:52:03 AM	H2 valve closed
12/25/2010	10:52:03 AM	BCl3 valve closed
12/25/2010	10:52:03 AM	PH3 valve closed
12/25/2010	10:52:03 AM	SiCl4 pre valve closed
12/25/2010	10:52:03 AM	SiCl4 post valve closed
12/25/2010	10:52:03 AM	Main Vac valve closed
12/25/2010	10:52:03 AM	Bubbler valve closed
12/25/2010	10:52:03 AM	Bypass valve opened
12/25/2010	10:52:03 AM	Helium MFC set to  0.000000
12/25/2010	10:52:03 AM	H2 MFC set to  0.000000
12/25/2010	10:52:03 AM	BCl3 MFC set to  0.000000
12/25/2010	10:52:03 AM	PHl3 MFC set to  0.000000
12/25/2010	10:52:03 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:52:03 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:52:03 AM	Tube furnace set to 0
12/25/2010	10:52:03 AM	Helium valve closed
12/25/2010	10:52:03 AM	H2 valve closed
12/25/2010	10:52:03 AM	BCl3 valve closed
12/25/2010	10:52:03 AM	PH3 valve closed
12/25/2010	10:52:03 AM	SiCl4 pre valve closed
12/25/2010	10:52:03 AM	SiCl4 post valve closed
12/25/2010	10:52:03 AM	Bubbler valve closed
12/25/2010	10:52:03 AM	Main Vac valve opened
12/25/2010	10:52:03 AM	Bypass valve opened
12/25/2010	10:52:03 AM	Helium MFC set to  0.000000
12/25/2010	10:52:03 AM	H2 MFC set to  0.000000
12/25/2010	10:52:03 AM	BCl3 MFC set to  0.000000
12/25/2010	10:52:03 AM	PHl3 MFC set to  0.000000
12/25/2010	10:52:03 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:52:03 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:52:04 AM	Tube furnace set to 0
12/25/2010	10:53:04 AM	H2 valve closed
12/25/2010	10:53:04 AM	BCl3 valve closed
12/25/2010	10:53:04 AM	PH3 valve closed
12/25/2010	10:53:04 AM	SiCl4 pre valve closed
12/25/2010	10:53:04 AM	SiCl4 post valve closed
12/25/2010	10:53:04 AM	Bubbler valve closed
12/25/2010	10:53:04 AM	Helium valve opened
12/25/2010	10:53:04 AM	Main Vac valve opened
12/25/2010	10:53:04 AM	Bypass valve opened
12/25/2010	10:53:04 AM	Helium MFC set to  100.000000
12/25/2010	10:53:04 AM	H2 MFC set to  0.000000
12/25/2010	10:53:04 AM	BCl3 MFC set to  0.000000
12/25/2010	10:53:04 AM	PHl3 MFC set to  0.000000
12/25/2010	10:53:04 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:53:04 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:53:04 AM	Tube furnace set to 0
12/25/2010	10:54:04 AM	Helium valve closed
12/25/2010	10:54:04 AM	H2 valve closed
12/25/2010	10:54:04 AM	BCl3 valve closed
12/25/2010	10:54:04 AM	PH3 valve closed
12/25/2010	10:54:04 AM	SiCl4 pre valve closed
12/25/2010	10:54:04 AM	SiCl4 post valve closed
12/25/2010	10:54:04 AM	Bubbler valve closed
12/25/2010	10:54:04 AM	Main Vac valve opened
12/25/2010	10:54:04 AM	Bypass valve opened
12/25/2010	10:54:04 AM	Helium MFC set to  0.000000
12/25/2010	10:54:04 AM	H2 MFC set to  0.000000
12/25/2010	10:54:04 AM	BCl3 MFC set to  0.000000
12/25/2010	10:54:04 AM	PHl3 MFC set to  0.000000
12/25/2010	10:54:04 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:54:04 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:54:04 AM	Tube furnace set to 0
12/25/2010	10:54:56 AM	H2 valve closed
12/25/2010	10:54:56 AM	BCl3 valve closed
12/25/2010	10:54:56 AM	PH3 valve closed
12/25/2010	10:54:56 AM	SiCl4 pre valve closed
12/25/2010	10:54:56 AM	SiCl4 post valve closed
12/25/2010	10:54:56 AM	Bubbler valve closed
12/25/2010	10:54:56 AM	Helium valve opened
12/25/2010	10:54:56 AM	Main Vac valve opened
12/25/2010	10:54:56 AM	Bypass valve opened
12/25/2010	10:54:56 AM	Helium MFC set to  100.000000
12/25/2010	10:54:56 AM	H2 MFC set to  0.000000
12/25/2010	10:54:56 AM	BCl3 MFC set to  0.000000
12/25/2010	10:54:56 AM	PHl3 MFC set to  0.000000
12/25/2010	10:54:56 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:54:56 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:54:56 AM	Tube furnace set to 0
12/25/2010	10:55:56 AM	Helium valve closed
12/25/2010	10:55:56 AM	H2 valve closed
12/25/2010	10:55:56 AM	BCl3 valve closed
12/25/2010	10:55:56 AM	PH3 valve closed
12/25/2010	10:55:56 AM	SiCl4 pre valve closed
12/25/2010	10:55:56 AM	SiCl4 post valve closed
12/25/2010	10:55:56 AM	Bubbler valve closed
12/25/2010	10:55:56 AM	Main Vac valve opened
12/25/2010	10:55:56 AM	Bypass valve opened
12/25/2010	10:55:56 AM	Helium MFC set to  0.000000
12/25/2010	10:55:56 AM	H2 MFC set to  0.000000
12/25/2010	10:55:56 AM	BCl3 MFC set to  0.000000
12/25/2010	10:55:56 AM	PHl3 MFC set to  0.000000
12/25/2010	10:55:56 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:55:56 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:55:56 AM	Tube furnace set to 0
12/25/2010	10:56:21 AM	Run aborted at 10:56 AM
12/25/2010	10:56:21 AM	Helium valve closed
12/25/2010	10:56:21 AM	H2 valve closed
12/25/2010	10:56:21 AM	BCl3 valve closed
12/25/2010	10:56:21 AM	PH3 valve closed
12/25/2010	10:56:21 AM	SiCl4 pre valve closed
12/25/2010	10:56:21 AM	SiCl4 post valve closed
12/25/2010	10:56:21 AM	Bypass valve closed
12/25/2010	10:56:21 AM	Main Vac valve closed
12/25/2010	10:56:21 AM	Bubbler valve closed
12/25/2010	10:56:21 AM	Helium MFC set to  0.000000
12/25/2010	10:56:21 AM	H2 MFC set to  0.000000
12/25/2010	10:56:21 AM	BCl3 MFC set to  0.000000
12/25/2010	10:56:21 AM	PHl3 MFC set to  0.000000
12/25/2010	10:56:21 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:56:21 AM	Tube furnace set to 0
12/25/2010	10:56:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/25/2010	10:56:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/25/2010	10:56:22 AM	Recipe started at 10:56 AM
12/25/2010	10:56:22 AM	Helium valve closed
12/25/2010	10:56:22 AM	H2 valve closed
12/25/2010	10:56:22 AM	BCl3 valve closed
12/25/2010	10:56:22 AM	PH3 valve closed
12/25/2010	10:56:22 AM	SiCl4 pre valve closed
12/25/2010	10:56:22 AM	SiCl4 post valve closed
12/25/2010	10:56:22 AM	Main Vac valve closed
12/25/2010	10:56:22 AM	Bubbler valve closed
12/25/2010	10:56:22 AM	Bypass valve opened
12/25/2010	10:56:22 AM	Helium MFC set to  0.000000
12/25/2010	10:56:22 AM	H2 MFC set to  0.000000
12/25/2010	10:56:22 AM	BCl3 MFC set to  0.000000
12/25/2010	10:56:22 AM	PHl3 MFC set to  0.000000
12/25/2010	10:56:22 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:56:22 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:56:22 AM	Tube furnace set to 0
12/25/2010	10:56:23 AM	Helium valve closed
12/25/2010	10:56:23 AM	H2 valve closed
12/25/2010	10:56:23 AM	BCl3 valve closed
12/25/2010	10:56:23 AM	PH3 valve closed
12/25/2010	10:56:23 AM	SiCl4 pre valve closed
12/25/2010	10:56:23 AM	SiCl4 post valve closed
12/25/2010	10:56:23 AM	Bubbler valve closed
12/25/2010	10:56:23 AM	Main Vac valve opened
12/25/2010	10:56:23 AM	Bypass valve opened
12/25/2010	10:56:23 AM	Helium MFC set to  0.000000
12/25/2010	10:56:23 AM	H2 MFC set to  0.000000
12/25/2010	10:56:23 AM	BCl3 MFC set to  0.000000
12/25/2010	10:56:23 AM	PHl3 MFC set to  0.000000
12/25/2010	10:56:23 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:56:23 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:56:23 AM	Tube furnace set to 0
12/25/2010	10:56:23 AM	Run finished at 10:56 AM
12/25/2010	10:56:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/25/2010	10:57:31 AM	Recipe started at 10:57 AM
12/25/2010	10:57:31 AM	Helium valve closed
12/25/2010	10:57:31 AM	BCl3 valve closed
12/25/2010	10:57:31 AM	PH3 valve closed
12/25/2010	10:57:31 AM	SiCl4 pre valve closed
12/25/2010	10:57:31 AM	SiCl4 post valve closed
12/25/2010	10:57:31 AM	Main Vac valve closed
12/25/2010	10:57:31 AM	Bypass valve closed
12/25/2010	10:57:31 AM	Bubbler valve closed
12/25/2010	10:57:31 AM	H2 valve opened
12/25/2010	10:57:31 AM	Helium MFC set to  0.000000
12/25/2010	10:57:31 AM	H2 MFC set to  500.000000
12/25/2010	10:57:31 AM	BCl3 MFC set to  0.000000
12/25/2010	10:57:31 AM	PHl3 MFC set to  0.000000
12/25/2010	10:57:31 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:57:31 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:57:31 AM	Tube furnace set to 0
12/25/2010	10:58:53 AM	Helium valve closed
12/25/2010	10:58:53 AM	BCl3 valve closed
12/25/2010	10:58:53 AM	PH3 valve closed
12/25/2010	10:58:53 AM	SiCl4 pre valve closed
12/25/2010	10:58:53 AM	SiCl4 post valve closed
12/25/2010	10:58:53 AM	Main Vac valve closed
12/25/2010	10:58:53 AM	Bypass valve closed
12/25/2010	10:58:53 AM	H2 valve opened
12/25/2010	10:58:53 AM	Bubbler valve opened
12/25/2010	10:58:53 AM	Helium MFC set to  0.000000
12/25/2010	10:58:53 AM	H2 MFC set to  500.000000
12/25/2010	10:58:53 AM	BCl3 MFC set to  0.000000
12/25/2010	10:58:53 AM	PHl3 MFC set to  0.000000
12/25/2010	10:58:53 AM	SiCl4 MFC set to  0.000000
12/25/2010	10:58:53 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	10:58:53 AM	Tube furnace set to 1000
12/25/2010	11:18:53 AM	Helium valve closed
12/25/2010	11:18:53 AM	PH3 valve closed
12/25/2010	11:18:53 AM	Main Vac valve closed
12/25/2010	11:18:53 AM	Bypass valve closed
12/25/2010	11:18:53 AM	H2 valve opened
12/25/2010	11:18:53 AM	BCl3 valve opened
12/25/2010	11:18:53 AM	SiCl4 pre valve opened
12/25/2010	11:18:53 AM	SiCl4 post valve opened
12/25/2010	11:18:53 AM	Bubbler valve opened
12/25/2010	11:18:53 AM	Helium MFC set to  0.000000
12/25/2010	11:18:53 AM	H2 MFC set to  500.000000
12/25/2010	11:18:53 AM	BCl3 MFC set to  12.000000
12/25/2010	11:18:53 AM	PHl3 MFC set to  0.000000
12/25/2010	11:18:53 AM	SiCl4 MFC set to  50.000000
12/25/2010	11:18:53 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	11:18:53 AM	Tube furnace set to 1000
12/25/2010	11:38:53 AM	H2 valve closed
12/25/2010	11:38:53 AM	BCl3 valve closed
12/25/2010	11:38:53 AM	PH3 valve closed
12/25/2010	11:38:53 AM	SiCl4 pre valve closed
12/25/2010	11:38:53 AM	SiCl4 post valve closed
12/25/2010	11:38:53 AM	Main Vac valve closed
12/25/2010	11:38:53 AM	Bypass valve closed
12/25/2010	11:38:53 AM	Helium valve opened
12/25/2010	11:38:53 AM	Bubbler valve opened
12/25/2010	11:38:53 AM	Helium MFC set to  500.000000
12/25/2010	11:38:53 AM	H2 MFC set to  0.000000
12/25/2010	11:38:53 AM	BCl3 MFC set to  0.000000
12/25/2010	11:38:53 AM	PHl3 MFC set to  0.000000
12/25/2010	11:38:53 AM	SiCl4 MFC set to  0.000000
12/25/2010	11:38:53 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	11:38:54 AM	Tube furnace set to 0
12/25/2010	11:58:54 AM	Helium valve closed
12/25/2010	11:58:54 AM	H2 valve closed
12/25/2010	11:58:54 AM	BCl3 valve closed
12/25/2010	11:58:54 AM	PH3 valve closed
12/25/2010	11:58:54 AM	SiCl4 pre valve closed
12/25/2010	11:58:54 AM	SiCl4 post valve closed
12/25/2010	11:58:54 AM	Main Vac valve closed
12/25/2010	11:58:54 AM	Bypass valve closed
12/25/2010	11:58:54 AM	Bubbler valve closed
12/25/2010	11:58:54 AM	Helium MFC set to  0.000000
12/25/2010	11:58:54 AM	H2 MFC set to  0.000000
12/25/2010	11:58:54 AM	BCl3 MFC set to  0.000000
12/25/2010	11:58:54 AM	PHl3 MFC set to  0.000000
12/25/2010	11:58:54 AM	SiCl4 MFC set to  0.000000
12/25/2010	11:58:54 AM	Bypass solenoid MFC set to  0.000000
12/25/2010	11:58:54 AM	Tube furnace set to 0
12/25/2010	11:58:54 AM	Run finished at 11:58 AM
12/25/2010	5:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/25/2010	5:05:15 PM	Recipe started at 5:05 PM
12/25/2010	5:05:15 PM	Helium valve closed
12/25/2010	5:05:15 PM	H2 valve closed
12/25/2010	5:05:15 PM	BCl3 valve closed
12/25/2010	5:05:15 PM	PH3 valve closed
12/25/2010	5:05:15 PM	SiCl4 pre valve closed
12/25/2010	5:05:15 PM	SiCl4 post valve closed
12/25/2010	5:05:15 PM	Main Vac valve closed
12/25/2010	5:05:15 PM	Bubbler valve closed
12/25/2010	5:05:15 PM	Bypass valve opened
12/25/2010	5:05:15 PM	Helium MFC set to  0.000000
12/25/2010	5:05:15 PM	H2 MFC set to  0.000000
12/25/2010	5:05:15 PM	BCl3 MFC set to  0.000000
12/25/2010	5:05:15 PM	PHl3 MFC set to  0.000000
12/25/2010	5:05:15 PM	SiCl4 MFC set to  0.000000
12/25/2010	5:05:15 PM	Bypass solenoid MFC set to  0.000000
12/25/2010	5:05:15 PM	Tube furnace set to 0
12/25/2010	5:06:14 PM	Helium valve closed
12/25/2010	5:06:14 PM	H2 valve closed
12/25/2010	5:06:14 PM	BCl3 valve closed
12/25/2010	5:06:14 PM	PH3 valve closed
12/25/2010	5:06:14 PM	SiCl4 pre valve closed
12/25/2010	5:06:14 PM	SiCl4 post valve closed
12/25/2010	5:06:14 PM	Bubbler valve closed
12/25/2010	5:06:14 PM	Main Vac valve opened
12/25/2010	5:06:14 PM	Bypass valve opened
12/25/2010	5:06:14 PM	Helium MFC set to  0.000000
12/25/2010	5:06:14 PM	H2 MFC set to  0.000000
12/25/2010	5:06:14 PM	BCl3 MFC set to  0.000000
12/25/2010	5:06:14 PM	PHl3 MFC set to  0.000000
12/25/2010	5:06:14 PM	SiCl4 MFC set to  0.000000
12/25/2010	5:06:14 PM	Bypass solenoid MFC set to  0.000000
12/25/2010	5:06:14 PM	Tube furnace set to 0
12/25/2010	5:06:14 PM	Run finished at 5:06 PM
12/25/2010	5:06:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
